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Lam Research Corporation - In 2011, Novellus introduced the VECTOR® Extreme TEOS xT system - a plasma enhanced chemical vapor deposition (PECVD) system that broke boundaries for throughput and nanoscale defectivity levels.
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Lam Research plays long game, nurturing innovation at Tualatin site that employs thousands - oregonlive.com
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Novellus Introduces VECTOR Excel - A Modular Platform for Advanced Dielectrics That Require Pre- and Post-Processing
